Original language | Undefined/Unknown |
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Patent number | US 6280606 |
Priority date | 28/08/01 |
Publication status | Published - 2001 |
Method for imaging a mask patern on a substrate by means of EUV radiation.
JJM Braat (Inventor)
Research output: Patent
JJM Braat (Inventor)
Research output: Patent
Original language | Undefined/Unknown |
---|---|
Patent number | US 6280606 |
Priority date | 28/08/01 |
Publication status | Published - 2001 |