Method for improvement of aspect ratio, uniformity and pattern transfer capabilities for ultra high resolution

VA Sidorkin (Inventor), EWJM van der Drift (Inventor)

Research output: Patent

Aanvrager: TU Delft (OCT-08-070)

Keywords

@misc{5974b9cdd20a43e297d92b9e1fbca7cf,

title = "Method for improvement of aspect ratio, uniformity and pattern transfer capabilities for ultra high resolution",

keywords = "Octrooi",

author = "VA Sidorkin and {van der Drift}, EWJM",

note = "Aanvrager: TU Delft (OCT-08-070); 2002904; Aanvrager: TU Delft (OCT-08-070)",

year = "2009",

language = "Undefined/Unknown",

type = "Patent",

}