Method for improvement of aspect ratio, uniformity and pattern transfer capabilities for ultra high resolution

VA Sidorkin (Inventor), EWJM van der Drift (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent number2002904
IPCAanvrager: TU Delft (OCT-08-070)
Priority date19/05/09
Publication statusPublished - 2009

Keywords

  • Octrooi

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