Method for inspecting a specimen and charged particle beam device

B.J. Cook (Inventor), P. Kruit (Inventor), Ralf Roman Schmidt (Inventor), Ron Naftali (Inventor), Roman Barday (Inventor), Dieter Winkler (Inventor), Juergen Frosien (Inventor)

Research output: Patent

Original languageEnglish
IPCH01J
Priority date21/10/19
Publication statusPublished - 2021

Bibliographical note

Patent: OCT-19-108
Applicant: Applied Materials Israel Ltd.

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