Method for inspecting a specimen and charged particle beam device

B.J. Cook; P. Kruit; Ralf Roman Schmidt; Ron Naftali; Roman  Barday; Dieter Winkler; Juergen Frosien

Method for inspecting a specimen and charged particle beam device

B.J. Cook (Inventor), P. Kruit (Inventor), Ralf Roman Schmidt (Inventor), Ron Naftali (Inventor), Roman Barday (Inventor), Dieter Winkler (Inventor), Juergen Frosien (Inventor)

ImPhys/Microscopy Instrumentation & Techniques

Research output: Patent

Original language	English
Patent number	TWI790489
IPC	H01J
Priority date	21/10/19
Publication status	Published - 2023

Bibliographical note

Patent: OCT-19-108
Applicant: Applied Materials Israel Ltd.

1 Patent

Method for inspecting a specimen and charged particle beam device
Cook, B. J., Kruit, P., Schmidt, R. R., Naftali, R., Barday, R., Winkler, D. & Frosien, J., 2021, IPC No. H01J, Priority date 21 Oct 2019, Priority No. WO 2021/078352
Research output: Patent

Cite this

@misc{2d23d6ccf58e45c29b5574e0b96dd1fc,

title = "Method for inspecting a specimen and charged particle beam device",

author = "B.J. Cook and P. Kruit and Schmidt, {Ralf Roman} and Ron Naftali and Roman Barday and Dieter Winkler and Juergen Frosien",

note = "Patent: OCT-19-108 Applicant: Applied Materials Israel Ltd.; TWI790489; H01J",

year = "2023",

language = "English",

type = "Patent",

}