Method for inspecting a specimen and charged particle multi-beam device

Pieter Kruit (Inventor), Juergen Frosien (Inventor)

    Research output: Patent

    Original languageEnglish
    IPCH01J
    Priority date1/12/16
    Publication statusPublished - 2018

    Research Output

    Method for inspecting a specimen and charged particle multi-beam device

    Kruit, P. & Frosien, J., 2018, IPC No. H01J, Patent No. US 9,922,796, Priority date 1 Dec 2016

    Research output: Patent

    Cite this