Research output per year
Research output per year
| Original language | English |
|---|---|
| IPC | H01J |
| Priority date | 1/12/16 |
| Publication status | Published - 2018 |
Bibliographical note
Patent: OCT-16-081Applicant: Applied Materials Israel Ltd.
Research output
- 1 Patent
-
Method for inspecting a specimen and charged particle multi-beam device
Kruit, P. & Frosien, J., 2018, IPC No. H01J, Patent No. US 9,922,796, Priority date 1 Dec 2016Research output: Patent