| Original language | English |
|---|---|
| IPC | G02B, G01N |
| Priority date | 29/07/22 |
| Publication status | Published - 2024 |
Bibliographical note
Patent: OCT-22-046Applicant: TU Delft
Applicant: TU Delft
Method for localizing a region of interest in a sample and micromachining the sample using a charged particle beam
E.B. van der Wee (Inventor), D.B. Boltje (Inventor), J.P. Hoogenboom (Inventor)
Research output: Patent
Applicant: TU Delft