Original language | English |
---|---|
Patent number | EP 3146374 B1 |
IPC | G02B, H01J |
Priority date | 26/11/15 |
Publication status | Published - 2022 |
Bibliographical note
Patent:OCT-13-082Applicant: DELMIC B.V.
P. Kruit (Inventor), J.P. Hoogenboom (Inventor), N. Liv Hamarat (Inventor), A.C. Narvaez Gonzalez (Inventor)
Research output: Patent
Original language | English |
---|---|
Patent number | EP 3146374 B1 |
IPC | G02B, H01J |
Priority date | 26/11/15 |
Publication status | Published - 2022 |