Method for positioning a focal plane of a light imaging device and apparatus arranged for applying said method

P. Kruit (Inventor), J.P. Hoogenboom (Inventor), N. Liv Hamarat (Inventor), A.C. Narvaez Gonzalez (Inventor)

Research output: Patent

Original languageEnglish
IPCG02B, H01J
Priority date26/11/15
Publication statusPublished - 2014

Bibliographical note

Patent:OCT-13-082
Applicant: DELMIC B.V.

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