Method for suspended high-stress films on integrated distributed Bragg mirrors

A. Cupertino (Inventor), P.M. Sberna (Inventor), R.A. Norte (Inventor)

Research output: Patent

Original languageEnglish
IPCG02B
Priority date8/07/22
Publication statusPublished - 2024

Bibliographical note

Patent:OCT-22-012
Applicant: TU Delft

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