Original language | English |
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IPC | H01L, C23C |
Publication status | Published - 2021 |
Method of fabricating a hollow wall for controlling directional deposition of material
A. Singh (Inventor), Guanzhong Wang (Inventor)
Research output: Patent
A. Singh (Inventor), Guanzhong Wang (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | H01L, C23C |
Publication status | Published - 2021 |