Method of Manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element

P.W.H. Jager (Inventor), P Kruit (Inventor), AJ Bleeker (Inventor), KD van der Mast (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent numberUS 7,102.732
    IPCAanvrager: Elith LLC, Tempe AZ (US), Agere Systems Guardian Corp., Orlando, FL (US)
    Priority date5/09/06
    Publication statusPublished - 2006

    Keywords

    • other publications
    • Octrooi

    Cite this