Method of Manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element

P.W.H. Jager; P Kruit; AJ Bleeker; KD van der Mast

Method of Manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element

P.W.H. Jager (Inventor), P Kruit (Inventor), AJ Bleeker (Inventor), KD van der Mast (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US 7,102.732
IPC	Aanvrager: Elith LLC, Tempe AZ (US), Agere Systems Guardian Corp., Orlando, FL (US)
Priority date	5/09/06
Publication status	Published - 2006

Bibliographical note

Aanvrager: Elith LLC, Tempe AZ (US), Agere Systems Guardian Corp., Orlando, FL (US)

Keywords

other publications
Octrooi

Cite this

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title = "Method of Manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element",

keywords = "other publications, Octrooi",

author = "P.W.H. Jager and P Kruit and AJ Bleeker and {van der Mast}, KD",

note = "Aanvrager: Elith LLC, Tempe AZ (US), Agere Systems Guardian Corp., Orlando, FL (US); US 7,102.732; Aanvrager: Elith LLC, Tempe AZ (US), Agere Systems Guardian Corp., Orlando, FL (US)",

year = "2006",

language = "Undefined/Unknown",

type = "Patent",

}

TY - PAT

T1 - Method of Manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element

AU - Jager, P.W.H.

AU - Kruit, P

AU - Bleeker, AJ

AU - van der Mast, KD

N1 - Aanvrager: Elith LLC, Tempe AZ (US), Agere Systems Guardian Corp., Orlando, FL (US)

PY - 2006

Y1 - 2006

KW - other publications

KW - Octrooi

M3 - Patent

M1 - US 7,102.732

ER -