Method of manufacturing a micro unit and micro unit for use in a microscope

JF Creemer (Inventor), G Pandraud (Inventor), F Santagata (Inventor)

Electronic Components, Technology and Materials

Research output: Patent

Original language	Undefined/Unknown
Patent number	P87953NL00
IPC	Aanvrager TU Delft
Priority date	1/01/00
Publication status	Published - 2009

Bibliographical note

Aanvrager TU Delft

Keywords

Octrooi

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