Method of manufacturing a micro unit and micro unit for use in a microscope

JF Creemer (Inventor), G Pandraud (Inventor), F Santagata (Inventor)

Electronic Components, Technology and Materials

Research output: Patent

Original language	English
Patent number	WO2011019276
Priority date	17/02/11
Publication status	Published - 2011

Keywords

Octrooi

Other files and links

http://www.wipo.int/patentscope/search/en/WO2011019276

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