| Original language | English |
|---|---|
| Place of Publication | Delft and Nijmegen, the netherlands |
| Publisher | TU Delft and NXP semiconductor BV, netherlands |
| Publication status | Published - 2011 |
Method of monolithically integrating MEMS/NEMS sensors/actuators with MEMS/NEMS sensors/actuators and example semiconductor process for making the same
V Rajaraman
Research output: Non-textual form › Artefact › Professional