Method of producing silicon device

H Ohji (Inventor), K Tsutsumi (Inventor), PJ French (Inventor), T Aoyama (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Priority date20/07/00
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this

Ohji, H., Tsutsumi, K., French, PJ., & Aoyama, T. (2000). Method of producing silicon device.