@inproceedings{9a70ab90f03d45ca9a480ff6d62b5ce2,
title = "Methods for optical modeling and cross-checking in ellipsometry and scatterometry",
author = "P Petrik and B Fodor and E Agocs and P Kozma and J Nador and N Kumar and J Endres and G Juhasz and C Major and SF Pereira and T Lohner and HP Urbach and B Bodermann and M Fried",
note = "Harvest; Modeling Aspects in Optical Metrology V, Munich, Germany ; Conference date: 23-06-2015 Through 25-06-2015",
year = "2015",
doi = "10.1117/12.2184833",
language = "English",
isbn = "9781628416862",
publisher = "SPIE",
pages = "1--11",
editor = "B Bodermann and K Frenner and RM Silver",
booktitle = "Modeling Aspects in Optical Metrology V",
address = "United States",
}