Methods for optical modeling and cross-checking in ellipsometry and scatterometry

P Petrik, B Fodor, E Agocs, P Kozma, J Nador, N Kumar, J Endres, G Juhasz, C Major, SF Pereira, T Lohner, HP Urbach, B Bodermann, M Fried

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationModeling Aspects in Optical Metrology V
EditorsB Bodermann, K Frenner, RM Silver
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages1-11
Number of pages11
ISBN (Print)9781628416862
DOIs
Publication statusPublished - 2015
EventModeling Aspects in Optical Metrology V, Munich, Germany - Bellingham, WA, USA
Duration: 23 Jun 201525 Jun 2015

Publication series

Name
PublisherSPIE
NameProceedings of SPIE- International Society for Optical Engineering
Volume9526
ISSN (Print)0277-786X

Conference

ConferenceModeling Aspects in Optical Metrology V, Munich, Germany
Period23/06/1525/06/15

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