@inproceedings{d7a7126af1cd4a1a8733d676da64de51,
title = "Micro-fabrication as enabler for sub-¿m photonic alignment",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "M Tichem and {van Gurp}, JFC and TJ Peters and VA Henneken",
year = "2012",
doi = "10.1109/ESTC.2012.6542172",
language = "English",
isbn = "978-1-4673-4645-0",
publisher = "IEEE Society",
pages = "1--6",
booktitle = "Proceedings 2012 4th Electronic System-Integration Technology Conference",
note = "2012 4th Electronic System-Integration Technology Conference (ESTC), ESTC 2012 ; Conference date: 17-09-2012 Through 20-09-2012",
}