Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology

W. J. Westerveld; B. Figeys; H. Gao; C. H. Huang; F. Verhaegen; B. Troia; R. Haouari; P. Neutens; J. O’Callaghan; S. Lenci; X. Rottenberg; R. Jansen; V. Rochus

Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology

W. J. Westerveld, B. Figeys, H. Gao, C. H. Huang, F. Verhaegen, B. Troia, R. Haouari, P. Neutens, J. O’Callaghan, S. Lenci, X. Rottenberg, R. Jansen, V. Rochus

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Abstract

Micro-electro-mechanical systems (MEMS) are used in applications ranging from consumer electronics to medical diagnostics. Alternatively, optical sensors offer low-noise, remote read-out via optical fiber, and are insensitive to electromagnetic interference. We demonstrate micro-opto-mechanical sensors (MOMS) in siliconnitride photonic technology. Experimental results and design trade-offs of pressure, sound, and ultrasound sensors are reported. Transparency for visible light offers prospective applications in life sciences, such as photo-acoustics.

Original language	English
Title of host publication	21th European Conference on Integrated Optics (ECIO 2019)
Place of Publication	Ghent
Number of pages	3
Publication status	Published - 2019
Externally published	Yes

Cite this

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title = "Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology",

abstract = "Micro-electro-mechanical systems (MEMS) are used in applications ranging from consumer electronics to medical diagnostics. Alternatively, optical sensors offer low-noise, remote read-out via optical fiber, and are insensitive to electromagnetic interference. We demonstrate micro-opto-mechanical sensors (MOMS) in siliconnitride photonic technology. Experimental results and design trade-offs of pressure, sound, and ultrasound sensors are reported. Transparency for visible light offers prospective applications in life sciences, such as photo-acoustics.",

author = "Westerveld, {W. J.} and B. Figeys and H. Gao and Huang, {C. H.} and F. Verhaegen and B. Troia and R. Haouari and P. Neutens and J. O{\textquoteright}Callaghan and S. Lenci and X. Rottenberg and R. Jansen and V. Rochus",

year = "2019",

language = "English",

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TY - GEN

T1 - Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology

AU - Westerveld, W. J.

AU - Figeys, B.

AU - Gao, H.

AU - Huang, C. H.

AU - Verhaegen, F.

AU - Troia, B.

AU - Haouari, R.

AU - Neutens, P.

AU - O’Callaghan, J.

AU - Lenci, S.

AU - Rottenberg, X.

AU - Jansen, R.

AU - Rochus, V.

PY - 2019

Y1 - 2019

N2 - Micro-electro-mechanical systems (MEMS) are used in applications ranging from consumer electronics to medical diagnostics. Alternatively, optical sensors offer low-noise, remote read-out via optical fiber, and are insensitive to electromagnetic interference. We demonstrate micro-opto-mechanical sensors (MOMS) in siliconnitride photonic technology. Experimental results and design trade-offs of pressure, sound, and ultrasound sensors are reported. Transparency for visible light offers prospective applications in life sciences, such as photo-acoustics.

AB - Micro-electro-mechanical systems (MEMS) are used in applications ranging from consumer electronics to medical diagnostics. Alternatively, optical sensors offer low-noise, remote read-out via optical fiber, and are insensitive to electromagnetic interference. We demonstrate micro-opto-mechanical sensors (MOMS) in siliconnitride photonic technology. Experimental results and design trade-offs of pressure, sound, and ultrasound sensors are reported. Transparency for visible light offers prospective applications in life sciences, such as photo-acoustics.

M3 - Conference contribution

BT - 21th European Conference on Integrated Optics (ECIO 2019)

CY - Ghent

ER -

Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology

Abstract

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