Micro piezo xyO-table design for three dimensional micro machining

HH Langen; J Duivenvoorden; DMT Weiler; J van Eijk; RH Munnig Schmidt

Micro piezo xyO-table design for three dimensional micro machining

HH Langen, J Duivenvoorden, DMT Weiler, J van Eijk, RH Munnig Schmidt

Mechatronic Systems Design

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	The Proceedings of the 7th Euspen International Conference
Editors	E. Thornett
Place of Publication	Bedford
Publisher	euspen headquarters
Pages	180-183
Number of pages	4
ISBN (Print)	0-9553082-2-4
Publication status	Published - 2007
Event	The 7th Euspen International Conference - Bedford Duration: 20 May 2007 → 24 May 2007

Publication series

Name
Publisher	Euspen Headquarters

Conference

Conference	The 7th Euspen International Conference
Period	20/05/07 → 24/05/07

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{37a928b6a6274e558af8d491c00635f1,

title = "Micro piezo xyO-table design for three dimensional micro machining",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "HH Langen and J Duivenvoorden and DMT Weiler and {van Eijk}, J and {Munnig Schmidt}, RH",

year = "2007",

language = "Undefined/Unknown",

isbn = "0-9553082-2-4",

publisher = "euspen headquarters",

pages = "180--183",

editor = "{E. Thornett}",

booktitle = "The Proceedings of the 7th Euspen International Conference",

note = "The 7th Euspen International Conference ; Conference date: 20-05-2007 Through 24-05-2007",

}

Micro piezo xyO-table design for three dimensional micro machining. / Langen, HH; Duivenvoorden, J; Weiler, DMT et al.
The Proceedings of the 7th Euspen International Conference. ed. / E. Thornett. Bedford: euspen headquarters, 2007. p. 180-183.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Micro piezo xyO-table design for three dimensional micro machining

AU - Langen, HH

AU - Duivenvoorden, J

AU - Weiler, DMT

AU - van Eijk, J

AU - Munnig Schmidt, RH

PY - 2007

Y1 - 2007

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-9553082-2-4

SP - 180

EP - 183

BT - The Proceedings of the 7th Euspen International Conference

A2 - E. Thornett, null

PB - euspen headquarters

CY - Bedford

T2 - The 7th Euspen International Conference

Y2 - 20 May 2007 through 24 May 2007

ER -