Material Science
Microelectromechanical System
100%
Thermal Conductivity
100%
Devices
100%
Detector
100%
Gas
50%
Gas Flow
16%
Micromachining
16%
Membrane
16%
Surface
16%
Thin Films
16%
Engineering
Microelectromechanical System
100%
Thermal Conductivity
100%
Gas Flow
20%
Thin Films
20%
Micro Machining
20%
Sensor
20%
Measurement
20%
Flow Line
20%
Membrane
20%
Computer Simulation
20%
Gas Streams
20%
Surface
20%
Flow Range
20%
Design
20%
Detection
20%
Sample Gas
20%
Size Range
20%
Prototype
20%
INIS
thermal conductivity
100%
devices
100%
gases
50%
range
33%
membranes
16%
design
16%
machining
16%
dynamics
16%
surfaces
16%
simulation
16%
streams
16%
gas flow
16%
thin films
16%
detection
16%
sensors
16%
configuration
16%
size
16%
depth
16%
Keyphrases
Micro Thermal Conductivity Detectors
100%
Static Simulation
50%
Combined Surface
50%
Flow Range
50%
MEMS Process
50%
Fabricated Structure
50%
Device Sizing
50%