@article{1f7edf7b2a1d49d4a26ec9c30366a1e6,
title = "Microchemical voltage reference using the pull-in of a beam",
keywords = "ZX CWTS JFIS < 1.00",
author = "E Cretu and {Machado da Rocha}, LA and RF Wolffenbuttel",
note = "niet eerder opgevoerd",
year = "2001",
language = "Undefined/Unknown",
volume = "50",
pages = "1504--1507",
journal = "IEEE Transactions on Instrumentation and Measurement",
issn = "0018-9456",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "6",
}