Microcolumn design for a large scan field and pixel number

H. Weigand, S. Gautsch, W. Strohmaier, M. Fleischer, U Staufer

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2542-2546
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	27
Issue number	6
Publication status	Published - 2009

Keywords

@article{bb491bfab29b4faa940308c0daffea80,

title = "Microcolumn design for a large scan field and pixel number",

keywords = "professional journal papers, CWTS JFIS < 0.75",

author = "H. Weigand and S. Gautsch and W. Strohmaier and M. Fleischer and U Staufer",

year = "2009",

language = "Undefined/Unknown",

volume = "27",

pages = "2542--2546",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Microcolumn design for a large scan field and pixel number

AU - Weigand, H.

AU - Gautsch, S.

AU - Strohmaier, W.

AU - Fleischer, M.

AU - Staufer, U

PY - 2009

Y1 - 2009

KW - professional journal papers

KW - CWTS JFIS < 0.75

UR - http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTBD9000027000006002542000001&idtype=cvips&gifs=yes

M3 - Article

SN - 1071-1023

VL - 27

SP - 2542

EP - 2546

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -