Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications

E. Serra, M. Bawaj, A. Borrielli, G. Di Giuseppe, S. Forte, N. Kralj, N. Malossi, L. Marconi, F. Marin, F. Marino, B. Morana, R. Natali, G. Pandraud, A. Pontin, G.A. Prodi, M. Rossi, P.M. Sarro, D. Vitali, M. Bonaldi

Research output: Contribution to journal › Article › Scientific › peer-review

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