Microfabrication of palladium - silver alloy membranes for hydrogen separation

HD Tong, JWE Berenschot, MJ de Boer, JGE Gardeniers, H Wensink, HV Jansen, W Nijdam, MC Elwenspoek, FC Gielens, CJM van Rijn

Research output: Contribution to journalArticleScientificpeer-review

42 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)622-629
Number of pages8
JournalIEEE Journal of Microelectromechanical Systems
Issue number5
Publication statusPublished - 2003


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