Microfabrication of palladium - silver alloy membranes for hydrogen separation

HD Tong, JWE Berenschot, MJ de Boer, JGE Gardeniers, H Wensink, HV Jansen, W Nijdam, MC Elwenspoek, FC Gielens, CJM van Rijn

Research output: Contribution to journalArticleScientificpeer-review

41 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)622-629
Number of pages8
JournalIEEE Journal of Microelectromechanical Systems
Volume12
Issue number5
Publication statusPublished - 2003

Keywords

  • ZX CWTS JFIS >= 3.00

Cite this

Tong, HD., Berenschot, JWE., de Boer, MJ., Gardeniers, JGE., Wensink, H., Jansen, HV., Nijdam, W., Elwenspoek, MC., Gielens, FC., & van Rijn, CJM. (2003). Microfabrication of palladium - silver alloy membranes for hydrogen separation. IEEE Journal of Microelectromechanical Systems, 12(5), 622-629.