@article{a623a9bc24454201adbba1c5082d2f00,
title = "Microfabrication of palladium - silver alloy membranes for hydrogen separation",
keywords = "ZX CWTS JFIS >= 3.00",
author = "HD Tong and JWE Berenschot and {de Boer}, MJ and JGE Gardeniers and H Wensink and HV Jansen and W Nijdam and MC Elwenspoek and FC Gielens and {van Rijn}, CJM",
note = "niet eerder opgenomen",
year = "2003",
language = "Undefined/Unknown",
volume = "12",
pages = "622--629",
journal = "IEEE Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "5",
}