Original language | Undefined/Unknown |
---|---|
Title of host publication | MEMS technology and devices |
Editors | A. Liu, J. Wu, C.Lu, C.D. Reddy |
Place of Publication | singapore |
Publisher | pan Stanford |
Pages | 414-417 |
Number of pages | 4 |
ISBN (Print) | 978-981-270-960-8 |
Publication status | Published - 2007 |
Bibliographical note
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