Microhotplates with TiN heaters

JF Creemer, D Briand, HW Zandbergen, W van der Vlist, CR de Boer, NF de Rooij, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

67 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)416-421
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume148
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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