@article{db1d11ed9071430ab91dd6bc32a660de,
title = "Microhotplates with TiN heaters",
keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "JF Creemer and D Briand and HW Zandbergen and {van der Vlist}, W and {de Boer}, CR and {de Rooij}, NF and PM Sarro",
year = "2008",
language = "Undefined/Unknown",
volume = "148",
pages = "416--421",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}