@inproceedings{903c690a048a4c32ad4475a2ae67520d,
title = "Micromachined membrane deformable mirrors for space applications",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "G Vdovin and PM Sarro and S Manhart and Z Sodnik",
year = "2000",
language = "Undefined/Unknown",
isbn = "87-89935-50-0",
publisher = "Mikroelektronik Centret",
pages = "599--560",
editor = "{R Reus}, de and {S Bouwstra}",
booktitle = "Eurosensors XIV",
note = "14th European Conference on Solid-State Transducers, Copenhagen ; Conference date: 27-08-2000 Through 30-08-2000",
}