@inproceedings{780f7a9266a8424d9b8c907be07b5b43,
title = "Micromachined SLM based on pixelated reflective membranes",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "S Sakarya and G Vdovin and PM Sarro",
year = "1999",
language = "Undefined/Unknown",
isbn = "0-8194-3246-6",
publisher = "International Society for Optical Engineering",
pages = "23--31",
editor = "{JD Gonglewski} and {MA Vorontsov}",
booktitle = "Proceedings of SPIE, vol. 3760",
note = "High-resolution wavefront control: methods, devices and applications, Denver ; Conference date: 18-07-1999 Through 23-07-1999",
}