@inproceedings{bd64fed8f5bb45ffaf5fe5ea780af375,
title = "Micromachined spatial light modulators based on viscoalastic layers",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "S Sakarya and GV Vdovin and PM Sarro",
year = "2002",
language = "Undefined/Unknown",
isbn = "7-5615-1718-1",
publisher = "Xiamen University Press",
pages = "625--628",
booktitle = "Pacific RIM workshop on transducers and micro/nano technologies",
note = "Pacific RIM workshop on transducers and micro/nano technologies, Xiamen, China ; Conference date: 22-07-2002 Through 24-07-2002",
}