Micromachined spatial light modulators based on viscoalastic layers

S Sakarya, GV Vdovin, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationPacific RIM workshop on transducers and micro/nano technologies
Place of PublicationXiamen
PublisherXiamen University Press
Pages625-628
Number of pages4
ISBN (Print)7-5615-1718-1
Publication statusPublished - 2002
EventPacific RIM workshop on transducers and micro/nano technologies, Xiamen, China - Xiamen, China
Duration: 22 Jul 200224 Jul 2002

Publication series

Name
PublisherXiamen University Press

Conference

ConferencePacific RIM workshop on transducers and micro/nano technologies, Xiamen, China
Period22/07/0224/07/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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