TY - JOUR
T1 - Micromachining for Advanced Terahertz
T2 - Interconnects and Packaging Techniques at Terahertz Frequencies
AU - Alonso-Del Pino, Maria
AU - Jung-Kubiak, Cecile
AU - Reck, Theodore
AU - Lee, Choonsup
AU - Chattopadhyay, Goutam
PY - 2020/1
Y1 - 2020/1
N2 - It is difficult to package and interconnect components and devices at millimeter-waves (mm-waves) due to excessive losses experiences at these frequencies using traditional techniques. The problem is multiplied manifold at terahertz (THz) frequencies. In this article, we review the current state of THz packaging and describe several novel techniques. As we will show, micromachined packaging is emerging as one of the best choices for developing advanced THz systems.
AB - It is difficult to package and interconnect components and devices at millimeter-waves (mm-waves) due to excessive losses experiences at these frequencies using traditional techniques. The problem is multiplied manifold at terahertz (THz) frequencies. In this article, we review the current state of THz packaging and describe several novel techniques. As we will show, micromachined packaging is emerging as one of the best choices for developing advanced THz systems.
UR - http://www.scopus.com/inward/record.url?scp=85076109589&partnerID=8YFLogxK
U2 - 10.1109/MMM.2019.2945157
DO - 10.1109/MMM.2019.2945157
M3 - Article
AN - SCOPUS:85076109589
VL - 21
SP - 18
EP - 34
JO - IEEE Microwave Magazine
JF - IEEE Microwave Magazine
SN - 1527-3342
IS - 1
M1 - 8913695
ER -