Micromachining techniques using layers grown in an epitaxial reactor

PTJ Gennissen

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Middelhoek, S, Supervisor, External person
  • French, P.J., Advisor
Award date1 Jan 1999
Place of PublicationDelft
Publisher
Print ISBNs90-407-1843-1
Publication statusPublished - 1999

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this

Gennissen, PTJ. (1999). Micromachining techniques using layers grown in an epitaxial reactor. Delft University Press.