Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	MEMS, A practical guide to design, analysis and applications
Editors	JG Korvinck, O Paul
Place of Publication	Norwich, NY
Publisher	William Andrew Publishing
Pages	805-851
Number of pages	47
ISBN (Print)	0-8155-1497-2
Publication status	Published - 2006

Keywords

@inbook{39ea15bc08474890afab03a17de6b15f,

title = "Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)",

keywords = "Boekdeel internat.wet",

author = "PJ French and PM Sarro",

year = "2006",

language = "Undefined/Unknown",

isbn = "0-8155-1497-2",

pages = "805--851",

editor = "JG Korvinck and O Paul",

booktitle = "MEMS, A practical guide to design, analysis and applications",

publisher = "William Andrew Publishing",

}

Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications). / French, PJ ; Sarro, PM.
MEMS, A practical guide to design, analysis and applications. ed. / JG Korvinck; O Paul. Norwich, NY: William Andrew Publishing, 2006. p. 805-851.

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

TY - CHAP

T1 - Micromachining technology: bulk micromachining (Chapter 15, MEMS, A practical guide to design, analysis and applications)

AU - French, PJ

AU - Sarro, PM

PY - 2006

Y1 - 2006

KW - Boekdeel internat.wet

M3 - Chapter

SN - 0-8155-1497-2

SP - 805

EP - 851

BT - MEMS, A practical guide to design, analysis and applications

A2 - Korvinck, JG

A2 - Paul, O

PB - William Andrew Publishing

CY - Norwich, NY

ER -