Original language | English |
---|---|
Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 20 |
Publication status | Published - 2010 |
Keywords
- CWTS 0.75 <= JFIS < 2.00
P Li, D Zdebski, HH Langen, AM Hoogstrate, JAJ Oosterling
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 20 |
Publication status | Published - 2010 |