Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

HD Tong, FC Gielens, JGE Gardeniers, HV Jansen, JW Berenschot, MJ de Boer, JH de Boer, CJM van Rijn, M Elwenspoek

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)113-124
Number of pages12
JournalIEEE Journal of Microelectromechanical Systems
Issue number11
Publication statusPublished - 2005


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