Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

HD Tong; FC Gielens; JGE Gardeniers; HV Jansen; JW Berenschot; MJ de Boer; JH de Boer; CJM van Rijn; M Elwenspoek

Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

HD Tong, FC Gielens, JGE Gardeniers, HV Jansen, JW Berenschot, MJ de Boer, JH de Boer, CJM van Rijn, M Elwenspoek

Computational Design and Mechanics

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	113-124
Number of pages	12
Journal	IEEE Journal of Microelectromechanical Systems
Volume	14
Issue number	11
Publication status	Published - 2005

Keywords

ZX CWTS JFIS >= 3.00

Cite this

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title = "Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation",

keywords = "ZX CWTS JFIS >= 3.00",

author = "HD Tong and FC Gielens and JGE Gardeniers and HV Jansen and JW Berenschot and {de Boer}, MJ and {de Boer}, JH and {van Rijn}, CJM and M Elwenspoek",

year = "2005",

language = "Undefined/Unknown",

volume = "14",

pages = "113--124",

journal = "IEEE Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

number = "11",

}

TY - JOUR

T1 - Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

AU - Tong, HD

AU - Gielens, FC

AU - Gardeniers, JGE

AU - Jansen, HV

AU - Berenschot, JW

AU - de Boer, MJ

AU - de Boer, JH

AU - van Rijn, CJM

AU - Elwenspoek, M

PY - 2005

Y1 - 2005

KW - ZX CWTS JFIS >= 3.00

M3 - Article

SN - 1057-7157

VL - 14

SP - 113

EP - 124

JO - IEEE Journal of Microelectromechanical Systems

JF - IEEE Journal of Microelectromechanical Systems

IS - 11

ER -