Microstructural defects of device quality hot-wire CVD poly-silicon films.

JK Rath, FD Tichelaar, REI Schropp

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    4 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publication"Amorphous and Microcrystalline Silicon Technology".
    EditorsR Schropp, HM Branz, RW Colins, H Okamoto, S Guha
    Pages573-578
    Number of pages6
    Publication statusPublished - 1999

    Publication series

    Name
    NameMaterials Research Society Symposium Proceedings
    Volume557
    ISSN (Print)0272-9172

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