Microstructure characterisation of location-controlled Si-islands crystallised by excimer laser in the µ-Czochralski (grain filter) process

D Danciu, R Ishihara, FD Tichelaar, Y Hiroshima, S Inoue, T Shimoda, JW Metselaar, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationAM-LCD 04; International workshop on active-matrix liquid-crystal displays - TFT technologies and related materials
Editors s.n.
Place of PublicationTokyo, Japan
PublisherJapan Society of Applied Physics
Pages145-148
Number of pages4
Publication statusPublished - 2004
Event2004 International workshop on active-matrix liquid0crystal displays - TFT technologies and related materials, Tokyo, Japan - Tokyo, Japan
Duration: 25 Aug 200427 Aug 2004

Publication series

Name
PublisherThe Japan Society of Applied Physics

Conference

Conference2004 International workshop on active-matrix liquid0crystal displays - TFT technologies and related materials, Tokyo, Japan
Period25/08/0427/08/04

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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