Microstructure characterization of location-controlled Si-islands crystallized by excimer laser in the mu-Czochralski (grain filter) process

R Ishihara; D Danciu; FD Tichelaar; M He; Y Hiroshima; S Inoue; T Shimoda; JW Metselaar; CIM Beenakker

Microstructure characterization of location-controlled Si-islands crystallized by excimer laser in the mu-Czochralski (grain filter) process

R Ishihara, D Danciu, FD Tichelaar, M He, Y Hiroshima, S Inoue, T Shimoda, JW Metselaar, CIM Beenakker

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific

Original language	Undefined/Unknown
Pages (from-to)	316-321
Number of pages	6
Journal	Journal of Crystal Growth
Volume	299
Issue number	2
Publication status	Published - 2007

Keywords

academic journal papers
CWTS 0.75 <= JFIS < 2.00

Cite this

@article{918160dc6fa84c0289520302bedd1cdf,

title = "Microstructure characterization of location-controlled Si-islands crystallized by excimer laser in the mu-Czochralski (grain filter) process",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "R Ishihara and D Danciu and FD Tichelaar and M He and Y Hiroshima and S Inoue and T Shimoda and JW Metselaar and CIM Beenakker",

year = "2007",

language = "Undefined/Unknown",

volume = "299",

pages = "316--321",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Microstructure characterization of location-controlled Si-islands crystallized by excimer laser in the mu-Czochralski (grain filter) process

AU - Ishihara, R

AU - Danciu, D

AU - Tichelaar, FD

AU - He, M

AU - Hiroshima, Y

AU - Inoue, S

AU - Shimoda, T

AU - Metselaar, JW

AU - Beenakker, CIM

PY - 2007

Y1 - 2007

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0022-0248

VL - 299

SP - 316

EP - 321

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 2

ER -