Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen

J Müllerová, P ¿utta, G van Elzakker, M Zeman, M Mikula

Research output: Contribution to journalArticleScientificpeer-review

52 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)3690-3695
Number of pages6
JournalApplied Surface Science
Volume254
Issue number12
DOIs
Publication statusPublished - 2007

Keywords

  • Elektrotechniek
  • Techniek
  • academic journal papers
  • CWTS JFIS < 0.75

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