@article{74df3b12e1154d0db2d40a66712391ee,
title = "Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen",
keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS JFIS < 0.75",
author = "J M{\"u}llerov{\'a} and P ¿utta and {van Elzakker}, G and M Zeman and M Mikula",
year = "2007",
doi = "10.1016/j.apsusc.2007.10.069",
language = "Undefined/Unknown",
volume = "254",
pages = "3690--3695",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "12",
}