Microstructure of plasma deposited SiGe layers (1700, 1710, 1733).

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Delft University of Technology
Number of pages	9
Publication status	Published - 2000

Name
Publisher	TU Delft

19 TEM afdrukken.

Keywords

@book{92c62e16d45143d69a1f52dbf0211c51,

title = "Microstructure of plasma deposited SiGe layers (1700, 1710, 1733).",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "FD Tichelaar and V Svetchnikov",

note = "19 TEM afdrukken.",

year = "2000",

language = "Undefined/Unknown",

publisher = "Delft University of Technology",

address = "Netherlands",

}