Microstructure of SiGe/Si multilayers and a-SiGe layers: P2141, P2192, P2537 and P1700

FD Tichelaar, TR de Kruijff

    Research output: Book/Report › Report › Professional

    Original languageUndefined/Unknown
    Place of PublicationDelft
    PublisherTechnische Universiteit Delft
    Number of pages9
    Publication statusPublished - 2002

    Publication series

    Name
    PublisherTUD

    Bibliographical note

    + 18 TEM afdrukken

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