Microwave mobility in profiled poly-Si thin films deposited on glass by hot-wire CVD

PATT van Veenendaal, TJ Savenije, JK Rath, REI Schropp

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{c1c795fa6872457cb221951c3f56872c,

title = "Microwave mobility in profiled poly-Si thin films deposited on glass by hot-wire CVD",

keywords = "ZX CWTS JFIS < 1.00",

author = "{van Veenendaal}, PATT and TJ Savenije and JK Rath and REI Schropp",

year = "2002",

language = "Undefined/Unknown",

volume = "403",

pages = "175--178",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}