Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

M. Ghaderi, E. Karimi, R.F. Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.

Original languageEnglish
Title of host publicationNovel Optical Materials and Applications, NOMA 2018
PublisherOptical Society of America (OSA)
Pages1-2
Number of pages2
VolumePart F107-NOMA 2018
ISBN (Electronic)978-1-943580-43-9
DOIs
Publication statusPublished - 2018
EventNovel Optical Materials and Applications, NOMA 2018 - Zurich, Switzerland
Duration: 2 Jul 20185 Jul 2018

Conference

ConferenceNovel Optical Materials and Applications, NOMA 2018
CountrySwitzerland
CityZurich
Period2/07/185/07/18

Keywords

  • Metamaterials
  • Optical microelectromechanical devices

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