Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

M. Ghaderi; E. Karimi; R.F. Wolffenbuttel

doi:10.1364/NOMA.2018.NoW1D.3

Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

M. Ghaderi^*, E. Karimi, R.F. Wolffenbuttel

^*Corresponding author for this work

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Abstract

Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.

Original language	English
Title of host publication	Novel Optical Materials and Applications, NOMA 2018
Publisher	Optical Society of America (OSA)
Pages	1-2
Number of pages	2
Volume	Part F107-NOMA 2018
ISBN (Electronic)	978-1-943580-43-9
DOIs	https://doi.org/10.1364/NOMA.2018.NoW1D.3
Publication status	Published - 2018
Event	Novel Optical Materials and Applications, NOMA 2018 - Zurich, Switzerland Duration: 2 Jul 2018 → 5 Jul 2018

Conference

Conference	Novel Optical Materials and Applications, NOMA 2018
Country/Territory	Switzerland
City	Zurich
Period	2/07/18 → 5/07/18

Keywords

Metamaterials
Optical microelectromechanical devices

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10.1364/NOMA.2018.NoW1D.3

Cite this

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title = "Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers",

abstract = "Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.",

keywords = "Metamaterials, Optical microelectromechanical devices",

author = "M. Ghaderi and E. Karimi and R.F. Wolffenbuttel",

year = "2018",

doi = "10.1364/NOMA.2018.NoW1D.3",

language = "English",

volume = "Part F107-NOMA 2018",

pages = "1--2",

booktitle = "Novel Optical Materials and Applications, NOMA 2018",

publisher = "Optical Society of America (OSA)",

note = "Novel Optical Materials and Applications, NOMA 2018 ; Conference date: 02-07-2018 Through 05-07-2018",

}

Ghaderi, M, Karimi, E & Wolffenbuttel, RF 2018, Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers. in Novel Optical Materials and Applications, NOMA 2018. vol. Part F107-NOMA 2018, NoW1D.3, Optical Society of America (OSA), pp. 1-2, Novel Optical Materials and Applications, NOMA 2018, Zurich, Switzerland, 2/07/18. https://doi.org/10.1364/NOMA.2018.NoW1D.3

Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers. / Ghaderi, M.; Karimi, E.; Wolffenbuttel, R.F.
Novel Optical Materials and Applications, NOMA 2018. Vol. Part F107-NOMA 2018 Optical Society of America (OSA), 2018. p. 1-2 NoW1D.3.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Karimi, E.

AU - Wolffenbuttel, R.F.

PY - 2018

Y1 - 2018

N2 - Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.

AB - Integration of an array of differently tuned mid-infrared metamaterial-based absorbers on top of thermopile detector arrays in a compatible fabrication process is presented. UV lithography is used for patterning over large areas with high throughput.

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KW - Optical microelectromechanical devices

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U2 - 10.1364/NOMA.2018.NoW1D.3

DO - 10.1364/NOMA.2018.NoW1D.3

M3 - Conference contribution

AN - SCOPUS:85051266186

VL - Part F107-NOMA 2018

SP - 1

EP - 2

BT - Novel Optical Materials and Applications, NOMA 2018

PB - Optical Society of America (OSA)

T2 - Novel Optical Materials and Applications, NOMA 2018

Y2 - 2 July 2018 through 5 July 2018

ER -

Mid-Infrared Microspectrometers Based on an Array of Differently Tuned Integrated Metamaterial Absorbers

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Conference

Keywords

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