MIMO Self-sensing control of a piezoelectric tube scanner

S Kuiper, G Schitter

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


Piezoelectric tube scanners are commonly used in Scanning Probe Microscopy (SPM) to provide the scanning motion of the tip or sample. Oscillations due to the weakly damped resonances of the scanner are a major souce of image distortion in SPM-imaging. In this contribution, multiple input-multiple output (MIMO) self-sensing actuation of a piezoelectric tube scanner is presented, allowing to actively dampen the scanner oscillation. By connecting the tube scanner in a capacitive bridge-circuit, the piezoelectric tube is simultaneously used as a sensor and actuator. In order to enable the use of low-order decentralized controllers, the cross-talk between both axes is reduced by compensating for the capacitive coupling. The MIMO self-sensing actuation allows to actively dampen the scanners's fundamentsl resonance by 18dB, which simultaneously reducing the resonance induced coupling by 30dB. Experimental results verify a significant reduction of the scanner oscillations in both positioning axes during fast scanning.
Original languageUndefined/Unknown
Title of host publicationProceedings of the ASME 2009 Dynamic Systems and Control Conference DSCC 2009
Editors s.n.
Place of PublicationHollywood, CA, USA
Number of pages6
Publication statusPublished - 2009
EventASME 2009 Dynamic Systems and Control Conference, DSCC 2009, Hollywood CA, USA - Hollywood, CA, USA
Duration: 12 Oct 200914 Oct 2009

Publication series



ConferenceASME 2009 Dynamic Systems and Control Conference, DSCC 2009, Hollywood CA, USA


  • Conf.proc. > 3 pag

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