Minimizing stress in large-area surface micromachined perforated membranes with slits

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12 Citations (Scopus)

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Journal of Micromechanics and Microengineering
Volume	25
Issue number	7
DOIs	https://doi.org/10.1088/0960-1317/25/7/074010
Publication status	Published - 2015

Harvest
Published 23-6-2015

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@article{b3517aac0c6647fe981aa5a89bda7649,

title = "Minimizing stress in large-area surface micromachined perforated membranes with slits",

author = "M Ghaderi and NP Ayerden and {de Graaf}, G and RF Wolffenbuttel",

note = "Harvest Published 23-6-2015",

year = "2015",

doi = "10.1088/0960-1317/25/7/074010",

language = "English",

volume = "25",

pages = "1--9",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "7",

}

TY - JOUR

T1 - Minimizing stress in large-area surface micromachined perforated membranes with slits

AU - Ghaderi, M

AU - Ayerden, NP

AU - de Graaf, G

AU - Wolffenbuttel, RF

N1 - Harvest Published 23-6-2015

PY - 2015

Y1 - 2015

U2 - 10.1088/0960-1317/25/7/074010

DO - 10.1088/0960-1317/25/7/074010

M3 - Article

SN - 0960-1317

VL - 25

SP - 1

EP - 9

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 7

ER -