Minimizing stress in large-area surface micromachined perforated membranes with slits

M Ghaderi, NP Ayerden, G de Graaf, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalJournal of Micromechanics and Microengineering
Volume25
Issue number7
DOIs
Publication statusPublished - 2015

Bibliographical note

Harvest
Published 23-6-2015

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