Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system

JJM Braat (Inventor)

Research output: Patent

Original languageUndefined/Unknown
Patent numberUS 6.800.861
IPCaanvrager: Koninklijke Philips Electronics N.V.
Priority date5/10/04
Publication statusPublished - 2004

Keywords

  • Octrooi

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