Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system

JJM Braat (Inventor)

Research output: Patent

Original language	Undefined/Unknown
Patent number	US 6.800.861
IPC	aanvrager: Koninklijke Philips Electronics N.V.
Priority date	5/10/04
Publication status	Published - 2004

aanvrager: Koninklijke Philips Electronics N.V.

Keywords

@misc{adc59030758349ab8b5505648efca5cd,

title = "Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system",

keywords = "Octrooi",

author = "JJM Braat",

note = "aanvrager: Koninklijke Philips Electronics N.V.; US 6.800.861; aanvrager: Koninklijke Philips Electronics N.V.",

year = "2004",

language = "Undefined/Unknown",

type = "Patent",

}