Original language | Undefined/Unknown |
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Patent number | AS 65255661 |
Priority date | 13/07/01 |
Publication status | Published - 2001 |
Mirror projection system for scanning lithographic projection apparatus.
JJM Braat (Inventor)
Research output: Patent
JJM Braat (Inventor)
Research output: Patent
Original language | Undefined/Unknown |
---|---|
Patent number | AS 65255661 |
Priority date | 13/07/01 |
Publication status | Published - 2001 |