| Original language | Undefined/Unknown |
|---|---|
| Patent number | US 56299318 |
| Priority date | 9/10/01 |
| Publication status | Published - 2001 |
Mirror projector system for a scanning lithographic projection apparatus.
JJM Braat (Inventor)
Research output: Patent
JJM Braat (Inventor)
Research output: Patent
| Original language | Undefined/Unknown |
|---|---|
| Patent number | US 56299318 |
| Priority date | 9/10/01 |
| Publication status | Published - 2001 |