Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition

PFA Alkemade; P Chen; E van Veldhoven; D Maas

Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition

PFA Alkemade, P Chen, E van Veldhoven, D Maas

QN/Kavli Nanolab Delft

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

27 Citations (Scopus)

Original language	English
Title of host publication	Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition
Editors	s.n.
Place of Publication	s.l.
Publisher	s.n.
Pages	c6f22-c6f25
ISBN (Print)	geen
Publication status	Published - 2010
Event	54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication - s.l. Duration: 1 Jun 2010 → 4 Jun 2010

Publication series

Name
Publisher	s.n.

Name	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	28
ISSN (Print)	1071-1023

Conference

Conference	54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
Period	1/06/10 → 4/06/10

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{2a6bc64e272545c1ba3c6cabbd400854,

title = "Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "PFA Alkemade and P Chen and Veldhoven, {E van} and D Maas",

year = "2010",

language = "English",

isbn = "geen",

publisher = "s.n.",

pages = "c6f22--c6f25",

editor = "s.n.",

booktitle = "Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition",

note = "54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication ; Conference date: 01-06-2010 Through 04-06-2010",

}

Alkemade, PFA, Chen, P, Veldhoven, EV & Maas, D 2010, Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition. in s.n. (ed.), Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition. Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures, vol. 28, s.n., s.l., pp. c6f22-c6f25, 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, 1/06/10.

Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition. / Alkemade, PFA; Chen, P; Veldhoven, E van et al.
Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition. ed. / s.n. s.l.: s.n., 2010. p. c6f22-c6f25 (Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures; Vol. 28).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition

AU - Alkemade, PFA

AU - Chen, P

AU - Veldhoven, E van

AU - Maas, D

PY - 2010

Y1 - 2010

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - geen

SP - c6f22-c6f25

BT - Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition

A2 - s.n., null

PB - s.n.

CY - s.l.

T2 - 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication

Y2 - 1 June 2010 through 4 June 2010

ER -