Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition

PFA Alkemade, P Chen, E van Veldhoven, D Maas

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Title of host publicationModel for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition
Editors s.n.
Place of Publications.l.
Publishers.n.
Pagesc6f22-c6f25
ISBN (Print)geen
Publication statusPublished - 2010
Event54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication - s.l.
Duration: 1 Jun 20104 Jun 2010

Publication series

Name
Publishers.n.
NameJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume28
ISSN (Print)1071-1023

Conference

Conference54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
Period1/06/104/06/10

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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