Model improvements to simulate charging in SEM

K. T. Arat, T. Klimpel, C. W. Hagen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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    Abstract

    Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. The improvements include both modelling of low energy electron scattering and charging of insulators. The new first-principle scattering models provide a more realistic charge distribution cloud in the material, and a better match between non-charging simulations and experimental results. Improvements on charging models mainly focus on redistribution of the charge carriers in the material with an induced conductivity (EBIC) and a breakdown model, leading to a smoother distribution of the charges. Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.

    Original languageEnglish
    Title of host publicationMetrology, Inspection, and Process Control for Microlithography XXXII
    EditorsV.A. Ukraintsev, O. Adan
    PublisherSPIE
    Volume10585
    ISBN (Electronic)9781510616622
    DOIs
    Publication statusPublished - 1 Jan 2018
    EventMetrology, Inspection, and Process Control for Microlithography XXXII 2018 - San Jose, United States
    Duration: 26 Feb 20181 Mar 2018

    Conference

    ConferenceMetrology, Inspection, and Process Control for Microlithography XXXII 2018
    CountryUnited States
    CitySan Jose
    Period26/02/181/03/18

    Keywords

    • Breakdown
    • Charging
    • EBIC
    • Low Energy Electrons
    • Monte-Carlo simulation
    • SEM

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